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Access Information

For users requesting access to the cleanrooms (Room 124 or Room 163):

  • General use is for students and post-docs working under faculty or faculty themselves.
  • Access can be granted to interested industrial users.
  • For more information regarding access, email Avra Kundu
  • Complete EHS 201 and EHS 202 at
  • Contact Dr. Keqi Qin for questions and scheduling regarding the Heidelberg DWL 66+ Laser Lithography tool at
  • During student training as a part of laboratory courses, all equipment will not be available for general use.