Characterization

Surface Profiler

Tier 3, Room 163

Capabilities: Stylus based surface profiler.

Manufacturer/ Product Name: Veeco, Dektak 150

Scanning Electron Microscope

Tier 4, Room 163

Manufacturer/ Product Name: Hitachi, S-4700

3-D Surface Profiler

Tier 1, Room 163

Capabilities: Has a resolution of 1 nm with laser confocal scanning, focus variation, and film thickness measurement functionalities.

Manufacturer/ Product Name: Keyence VK-X3050

Thin Film Stress Measurement Tool

Tier 2, Room 124

Capabilities: Allows substrate sizes up to 6 inches.

Manufacturer/ Product Name: Flexus F2300