Internal UCF User Fees
Tier 0 – $12.00
Cleanroom General Use
Tier 1 – $15.00
Includes Tabletop RIE with SF6 capability, Minibrute Doping/Oxidation Furnaces and 3-D Surface Profiler.
Tier 2 – $20.00
Includes EVG 620 Mask Aligner & UV Lithography, Dektak Surface Profiler and Thin Film Stress Measurement Tool.
Tier 3 – $33.00
Includes Anric Technologies 4 inch ALD System, Vacuum Annealing Furnace, 2-Gun AJA EBeam Evaporation, 4-Gun AJA Sputtering, 3-Gun AJA Sputtering, 6-Gun AJA Sputtering, and Jipelec JetFirst 150 Rapid Thermal Annealer.
Tier 4 – $40.00
Includes Scanning Electron Microscope and Laser Lithography.