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Furnaces

Vacuum Annealing Furnace

Tier 3, Room 124

Capabilities: Maximum substrate size of 4 inches.

Manufacturer/ Product Name: Across International, TF 1400 Tube Furnace

Doping/Oxidation Furnaces

Tier 1, Room 163

Capabilities: Maximum substrate size of 3 inches.

Manufacturer/ Product Name: MiniBrute

Rapid Thermal Annealer

Tier 3, Room 163

Capabilities: Maximum substrate size of 4 inches.

Manufacturer/ Product Name: Jipelec, JetFirst 150