Furnaces
![]() |
Vacuum Annealing FurnaceTier 3, Room 124 Capabilities: Maximum substrate size of 4 inches. Manufacturer/ Product Name: Across International, TF 1400 Tube Furnace |
![]() |
Doping/Oxidation FurnacesTier 1, Room 163 Capabilities: Maximum substrate size of 3 inches. Manufacturer/ Product Name: MiniBrute |
![]() |
Rapid Thermal AnnealerTier 3, Room 163 Capabilities: Maximum substrate size of 4 inches. Manufacturer/ Product Name: Jipelec, JetFirst 150 |