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Microelectronics Laboratory

Engineering 1, Room 163

This facility is an advanced research laboratory that is also utilized as an academic laboratory. It contains a Class 100 Clean Room and a Class 1000 Clean Room. Students learn the operation of the specialized equipment and the processes for fabrication of microelectronic devices. Two courses are offered for students to make actual devices and evaluate the characteristics of their devices.

Microelectronics Lab

Courses Supported

  • EEE-5332 Thin-Film Technology
  • EEE-5356 Fabrication of Solid-State Devices


Microelectronics Lab Equipment

  • Doping furnace
  • Diffusion furnace
  • Scanning Electron microscope
  • RF magnetron sputtering system
  • Rapid thermal annealing
  • Reactive Ion Etcher
  • Vacuum deposition (thermal)
  • Profilometer
  • Electron beam evaporation system
  • DC sputtering
  • Photolithography processing tools


Microelectronics Lab
Microelectronics Lab
Microelectronics Lab
Microelectronics Lab

Lab Manager Contact Information

Please feel free to contact us if you have questions, comments or suggestions regarding our academic laboratories, or just want to talk about something. We’re always happy to hear from you!


David R. Douglas, P.E.,, ENG-465
Avra Kundu,, ENG-122